Optically Accessible MEMS Resonant Mass Sensor for Biological Applications
نویسندگان
چکیده
منابع مشابه
Characterization of mass and swelling of hydrogel microstructures using MEMS resonant mass sensor arrays.
The use of hydrogels for biomedical engineering, and for the development of biologically inspired cellular systems at the microscale, is advancing at a rapid pace. Microelectromechanical system (MEMS) resonant mass sensors enable the mass measurement of a range of materials. The integration of hydrogels onto MEMS resonant mass sensors is demonstrated, and these sensors are used to characterize ...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2019
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2019.2906586